Lithography process model building using locally linear embedding

Kumar, PardeepPardeepKumarSrinivasan, BabjiBabjiSrinivasanMohapatra, Nihar RanjanNihar RanjanMohapatra2025-08-282025-08-282015-09-01https://d8.irins.org/handle/IITG2025/19630en-USLithography process modellinear embeddingLithography process model building using locally linear embeddingPoster PresentedPoster Presented123456789/356