Hotspot detection in lithographic patterns using machine learning technique

Mohapatra, Nihar RanjanSrinivasan, BabjiDawar, RohitRohitDawar2025-09-042025-09-042018-01-01https://d8.irins.org/handle/IITG2025/3223216210077Semiconductor IndustryResolution Enhancement TechniquesAerial Image IntensityLithography SimulatorsGeometrical ParametersHotspot detection in lithographic patterns using machine learning techniqueM.Techix, 69pM.Tech123456789/500