Srinivasan, BabjiMohapatra, Nihar RanjanKumar, PardeepPardeepKumar2025-09-042025-09-042019-01-01https://d8.irins.org/handle/IITG2025/32181ill.; 30 cm.12310006Electrical EngineeringPrincipal Component AnalysisDiscrete Cosine TransformOptical Proximity CorrectionLithography SimulationModeling and optimization techniques for efficient lithography simulationPh.D.xix, 142p.Ph.D.123456789/500