Relating surface and bulk electronic properties of Al-doped ZnO films deposited at varying substrate temperature by RF magnetron sputtering
Source
8th International Conference on Materials for Advanced Technology of the Materials Research Society of Singapore (ICMAT 2015)
Date Issued
2015-07-01
Author(s)
Singh, Chetan C.
Patel, Tvarit
Panda, Emila
Subjects
Surface and bulk electronic
Al-doped ZnO films
Varying substrate temperature